Growth and characterization of a porous aluminum oxide film formed on an electrically insulating support

被引:42
作者
Miney, PG [1 ]
Colavita, PE [1 ]
Schiza, MV [1 ]
Priore, RJ [1 ]
Haibach, FG [1 ]
Myrick, ML [1 ]
机构
[1] Univ S Carolina, Dept Chem & Biochem, Columbia, SC 29208 USA
关键词
ANODIC FILMS; TEMPLATE; FOILS;
D O I
10.1149/1.1602332
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Thin films of porous anodic aluminum oxide have been prepared on an electrically insulating support by the anodization of aluminum films sputtered onto glass slides. The resulting transparent aluminum oxide films were characterized by scanning electron microscopy and variable angle ellipsometry. Subsequently, the film was modeled from the ellipsometric data taken. An underlying conductive medium is not necessarily needed to bring about nearly complete anodization of the aluminum layer. (C) 2003 The Electrochemical Society.
引用
收藏
页码:B42 / B45
页数:4
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