Micromechanical and microtribological properties of BCN thin films near the B4C composition deposited by r.f. magnetron sputtering

被引：37

作者：

Martínez, E ^{[1
]}

Lousa, A ^{[1
]}

Esteve, J ^{[1
]}

机构：

[1] Univ Barcelona, Dept Fis Aplicada & Elect, E-08028 Barcelona, Spain

来源：

关键词：

carbides; thin films; hard materials; wear;

D O I：

10.1016/S0925-9635(01)00429-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ternary materials with compositions in the B-C-N system offer properties of great interest. In particular, mechanical and tribological properties are expected to be excellent, as they can combine some of the specific properties of BN, B4C and C3N4. In this paper, BCN thin films deposited by r.f. magnetron sputtering are characterized by their micromechanical and microtribological behavior. BCN coatings with different composition were obtained by varying the N-2/Ar proportion in the sputtering gas. Hardness and elastic modulus of the coatings were measured by nanoindentation. The adhesion and friction coefficient against diamond have been evaluated by microscratch and the coatings have been characterized in their wear behavior at the nanometric scale. These mechanical and tribological properties have been related to film composition and structure, which have been studied in a previous work. It is found that the measured wear resistance at the nanometric scale is directly related to the coating microhardness rather than friction behavior or adhesion of the coating to the substrate, which are the determinant factors in the macroscopic scale wear behavior. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：1892 / 1896

页数：5

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