Second-harmonic spectroscopy of interband excitations at the interfaces of strained Si(100)-Si0.85Ge0.15-SiO2 heterostructures

被引:41
作者
Erley, G
Butz, R
Daum, W
机构
[1] Forschungszentrum Julich, Inst Grenzflachenforsch & Vakuumphys, D-52425 Julich, Germany
[2] Forschungszentrum Julich, Inst Schicht & Ionentech, D-52425 Julich, Germany
来源
PHYSICAL REVIEW B | 1999年 / 59卷 / 04期
关键词
D O I
10.1103/PhysRevB.59.2915
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have applied optical second-harmonic generation to the spectroscopy of strained Si(100)-Si0.85Ge0.15-SiO2 heterostructures, covering the full range of the fundamental critical-point interband transitions. By analyzing spectra from samples with different thicknesses of the alloy layer ranging from 4 to 28 nm, we were able to resolve different interband excitations localized at the two buried interfaces of this system. The contribution of the substrate-alloy interface to the spectra consists of bulklike, E-1- and E-2-type critical-point transitions, consistent with a pseudomorphic structure of this interface. The dominating excitations at the alloy-oxide interface, comprised of a broad resonance centered around 3.6 eV, have no equivalent in the bulk, and were also observed at Si(100)-SiO2 interfaces. These transitions are assigned to alloy atoms without T-d symmetry at the boundary between the Si0.85Ge0.15 layer and the SiOx transition region. [S0163-1829(99)13903-1].
引用
收藏
页码:2915 / 2926
页数:12
相关论文
共 32 条
[1]  
Aktsipetrov O. A., 1992, Soviet Journal of Quantum Electronics, V22, P807, DOI 10.1070/QE1992v022n09ABEH003603
[2]  
[Anonymous], J APPL PHYS
[3]  
[Anonymous], 1992, NUMERICAL RECIPES PA
[4]  
BERGFELD S, UNPUB
[5]   2ND-HARMONIC GENERATION FROM SI(M)GE(N) SUPERLATTICES [J].
BOTTOMLEY, DJ ;
LUPKE, G ;
LEDGERWOOD, ML ;
ZHOU, XQ ;
VANDRIEL, HM .
APPLIED PHYSICS LETTERS, 1993, 63 (17) :2324-2326
[6]   2XN SURFACE-STRUCTURE OF SIGE LAYERS DEPOSITED ON SI(100) [J].
BUTZ, R ;
KAMPERS, S .
APPLIED PHYSICS LETTERS, 1992, 61 (11) :1307-1309
[7]   Optical second-harmonic electroreflectance spectroscopy of a Si(001) metal-oxide-semiconductor structure [J].
Dadap, JI ;
Hu, XF ;
Anderson, MH ;
Downer, MC ;
Lowell, JK ;
Aktsipetrov, OA .
PHYSICAL REVIEW B, 1996, 53 (12) :R7607-R7609
[8]   Femtosecond carrier-induced screening of dc electric-field-induced second-harmonic generation at the Si(001)-SiO2 interface [J].
Dadap, JI ;
Wilson, PT ;
Anderson, MH ;
Downer, MC ;
terBeek, M .
OPTICS LETTERS, 1997, 22 (12) :901-903
[9]   IDENTIFICATION OF STRAINED SILICON LAYERS AT SI-SIO2 INTERFACES AND CLEAN SI SURFACES BY NONLINEAR-OPTICAL SPECTROSCOPY [J].
DAUM, W ;
KRAUSE, HJ ;
REICHEL, U ;
IBACH, H .
PHYSICAL REVIEW LETTERS, 1993, 71 (08) :1234-1237
[10]   Silicon interband transitions observed at Si(100)-SiO2 interfaces [J].
Erley, G ;
Daum, W .
PHYSICAL REVIEW B, 1998, 58 (04) :R1734-R1737