Simple technique for replication of micro-optical elements

被引：43

作者：

Nussbaum, P ^{[1
]}

Philipoussis, I ^{[1
]}

Husser, A ^{[1
]}

Herzig, HP ^{[1
]}

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2000 Neuchatel, Switzerland

来源：

OPTICAL ENGINEERING | 1998年 / 37卷 / 06期

关键词：

replication; micro-optical elements; microsystems; elastomeric material;

D O I：

10.1117/1.601799

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A simple technique for the replication of micro-optical elements is presented. Elastomeric material is used to realize a negative mold of the original optical element and UV-curing adhesive is used to make the replicated copy. Replicated elements, such as refractive and diffractive micro-optical elements, are produced. The refractive microlenses have a diameter of 970 mu m and a height of 79 mu m and the diffractive element is a multilevel blazed grating with a period of 64 mu m. The characteristics of the replicated elements are measured using different methods. The deviation from a sphere of the original and the replicated refractive microlenses is 0.13 lambda and 0.12 lambda root mean square (rms), respectively. The replicated multilevel blazed grating has a diffraction efficiency of over 80%. An alternative method for realizing phenoconcave microlenses from a planoconvex master is also presented. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(98)01106-4].

引用

页码：1804 / 1808

页数：5

共 10 条

[1] THE MANUFACTURE OF MICROLENSES BY MELTING PHOTORESIST [J].

DALY, D ;

STEVENS, RF ;

HUTLEY, MC ;

DAVIES, N .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1990, 1 (08) :759-766

[2] Replication of optical components using a silicone rubber intermediate replica [J].

Daly, DJ ;

Ferguson, RA ;

Hutley, MC .

MICRO-OPTICAL TECHNOLOGIES FOR MEASUREMENT, SENSORS, AND MICROSYSTEMS II AND OPTICAL FIBER SENSOR TECHNOLOGIES AND APPLICATIONS, 1997, 3099 :83-88

[3]

Gale M T, 1997, MICROOPTICS ELEMENTS, P87

[4]

Herzig H.P., 1997, Micro-optics: Elements, Systems, and Applications

[5]

NUSSBAUM P, 1997, PURE APPL OPT, V6, P1

[6] TECHNIQUE FOR MONOLITHIC FABRICATION OF MICROLENS ARRAYS [J].

POPOVIC, ZD ;

SPRAGUE, RA ;

CONNELL, GAN .

APPLIED OPTICS, 1988, 27 (07) :1281-1284

[7] TWYMAN-GREEN INTERFEROMETER FOR TESTING MICROSPHERES [J].

SCHWIDER, J ;

FALKENSTORFER, O .

OPTICAL ENGINEERING, 1995, 34 (10) :2972-2975

[8]

Stern M. B., 1997, MICROOPTICS ELEMENTS, P53

[9] Elastomeric optics [J].

Wilbur, JL ;

Jackman, RJ ;

Whitesides, GM ;

Cheung, EL ;

Lee, LK ;

Prentiss, MG .

CHEMISTRY OF MATERIALS, 1996, 8 (07) :1380-1385

[10] Complex optical surfaces formed by replica molding against elastomeric masters [J].

Xia, YN ;

Kim, E ;

Zhao, XM ;

Rogers, JA ;

Prentiss, M ;

Whitesides, GM .

SCIENCE, 1996, 273 (5273) :347-349

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