Simulation model of surface acoustic wave motor considering tangential rigidity

被引：5

作者：

Asai, K ^{[1
]}

Kurosawa, MK

机构：

[1] Matsushita Elect Ind Co Ltd, Adv Technol Res Labs, Kyoto 6190237, Japan

[2] Tokyo Inst Technol, Dept Adv Appl Elect, Yokohama, Kanagawa 2268502, Japan

来源：

ELECTRONICS AND COMMUNICATIONS IN JAPAN PART III-FUNDAMENTAL ELECTRONIC SCIENCE | 2004年 / 87卷 / 02期

关键词：

surface acoustic wave; actuator; friction driving; contact analysis; MEMS;

D O I：

10.1002/ecjc.10098

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to attempt performance improvement of a surface acoustic wave motor, it is necessary to understand the contact condition between the stator substrate and the slider and to determine the relationship between the basic performance and the physical parameters. In this research, a simulation model taking into account the tangential rigidity on the stator substrate surface is proposed. The effects of parameters such as the friction coefficient, amplitude, and rigidity on the driving performance are elucidated. The validity of the proposed model is demonstrated by a comparison with the experimental results. In addition, detailed calculations are carried out, including determination of the normal position change of the slider by means of the simulation model. (C) 2003 Wiley Periodicals, Inc.

引用

页码：54 / 66

页数：13

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