Float zone growth and characterization of Ge1-xSix (x≤10 at%) single crystals

被引:76
作者
Campbell, TA
Schweizer, M
Dold, P
Cröll, A
Benz, KW
机构
[1] Univ Freiburg, Inst Kristallog, D-79104 Freiburg, Germany
[2] Tech Univ Freiberg, Inst NE Met & Reinststoffe, D-09599 Freiberg, Germany
[3] NASA, George C Marshall Space Flight Ctr, Huntsville, AL 35812 USA
关键词
computer simulation; convection; morphological stability; segregation; solutocapillary convection; thermocapillary convection; floating zone technique; germanium silicon alloys;
D O I
10.1016/S0022-0248(01)01394-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Ge1-xSix (x less than or equal to 10 at%) single crystals were grown with the float zone technique using a monoellipsoid mirror furnace. The feed rod consisted of pre-synthesized Ge0.95Si0.05 polycrystalline material with an initial composition of pure germanium. Several boron-doped (1-2 x 10(17) at cm (-3)) crystals were grown using (1 0 0) Ge seeds. Taking advantage of the pre-synthesized feed rods, a defined macrosegregation could be achieved in the grown crystals with a linear slope at the beginning (approximate to 0.5 at% mm (-1)) followed by a plateau region with a constant silicon distribution (Si concentration up to 10 at%, fluctuation rate: less than or equal to +/-0.3 at%). The etch pit density was in the range of 7 x 10(3)-2 x 10(4)cm(-2) Micrographs of the etched crystals show sharp changes in interface curvature at the crystal edges. These distortions of the interface morphology are a direct function of the Si concentration; they are considered to be caused by solutal Marangoni convection. Theoretical considerations show that the flow direction and strength vary significantly from a solutal Marangoni convection regime directly in front of the solid-liquid interface to a thermal Marangoni convection regime within the bulk melt. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:231 / 239
页数:9
相关论文
共 35 条
[1]  
[Anonymous], 1992, GEN PHYS PROPERTIES
[2]   Thermal and solutal Marangoni convection in In-Ga-Sb system [J].
Arafune, K ;
Hirata, A .
JOURNAL OF CRYSTAL GROWTH, 1999, 197 (04) :811-817
[3]  
ARAFUNE K, 1998, INT ASTR C MELB AUST
[4]  
BARZ A, 1999, THESIS A LUDWIGS U F
[5]  
CROELL A, 2001, UNPUB J CRYSTAL GROW
[6]  
CROLL A, 1996, THESIS A LUDWIGS U F
[7]  
Croll A., 1991, Microgravity Sci. Technol, V3, P204
[8]   Bulk single crystal growth of silicon-germanium [J].
Deitch, RH ;
Jones, SH ;
Digges, TG .
JOURNAL OF ELECTRONIC MATERIALS, 2000, 29 (09) :1074-1078
[9]   SURVEY OF INTERFACE STABILITY-CRITERIA IN ELEMENTAL ALLOY SYSTEMS - GE-SI, BI-SB, AND SE-TE [J].
DISMUKES, JP ;
YIM, WM .
JOURNAL OF CRYSTAL GROWTH, 1974, 22 (04) :287-294
[10]   Growth and characterization of Ge1-xSix (x≤10at%) single crystals [J].
Dold, P ;
Barz, A ;
Recha, S ;
Pressel, K ;
Franz, M ;
Benz, KW .
JOURNAL OF CRYSTAL GROWTH, 1998, 192 (1-2) :125-135