Float zone growth and characterization of Ge1-xSix (x≤10 at%) single crystals

被引:76
作者
Campbell, TA
Schweizer, M
Dold, P
Cröll, A
Benz, KW
机构
[1] Univ Freiburg, Inst Kristallog, D-79104 Freiburg, Germany
[2] Tech Univ Freiberg, Inst NE Met & Reinststoffe, D-09599 Freiberg, Germany
[3] NASA, George C Marshall Space Flight Ctr, Huntsville, AL 35812 USA
关键词
computer simulation; convection; morphological stability; segregation; solutocapillary convection; thermocapillary convection; floating zone technique; germanium silicon alloys;
D O I
10.1016/S0022-0248(01)01394-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Ge1-xSix (x less than or equal to 10 at%) single crystals were grown with the float zone technique using a monoellipsoid mirror furnace. The feed rod consisted of pre-synthesized Ge0.95Si0.05 polycrystalline material with an initial composition of pure germanium. Several boron-doped (1-2 x 10(17) at cm (-3)) crystals were grown using (1 0 0) Ge seeds. Taking advantage of the pre-synthesized feed rods, a defined macrosegregation could be achieved in the grown crystals with a linear slope at the beginning (approximate to 0.5 at% mm (-1)) followed by a plateau region with a constant silicon distribution (Si concentration up to 10 at%, fluctuation rate: less than or equal to +/-0.3 at%). The etch pit density was in the range of 7 x 10(3)-2 x 10(4)cm(-2) Micrographs of the etched crystals show sharp changes in interface curvature at the crystal edges. These distortions of the interface morphology are a direct function of the Si concentration; they are considered to be caused by solutal Marangoni convection. Theoretical considerations show that the flow direction and strength vary significantly from a solutal Marangoni convection regime directly in front of the solid-liquid interface to a thermal Marangoni convection regime within the bulk melt. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
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页码:231 / 239
页数:9
相关论文
共 35 条
[11]   Floating-zone growth of silicon in magnetic fields - I. Weak static axial fields [J].
Dold, P ;
Croll, A ;
Benz, KW .
JOURNAL OF CRYSTAL GROWTH, 1998, 183 (04) :545-553
[12]  
DOLD P, 2000, 51 INT ASTR C RIO JA, P1
[13]  
FITZGERALD EA, 1995, ANNU REV MATER SCI, V25, P417
[14]  
Glazov V.M., 1969, LIQUID SEMICONDUCTOR
[15]  
Gromova O.N., 1968, FIZ KHIM OBRAB MATER, V5, P166
[16]   THE SURFACE-TENSION OF LIQUID SILICON [J].
HARDY, SC .
JOURNAL OF CRYSTAL GROWTH, 1984, 69 (2-3) :456-460
[17]   SURFACE-TEMPERATURE OSCILLATIONS OF A FLOATING ZONE RESULTING FROM OSCILLATORY THERMOCAPILLARY CONVECTION [J].
JURISCH, M .
JOURNAL OF CRYSTAL GROWTH, 1990, 102 (1-2) :223-232
[18]   MACROSEGREGATION AND CONVECTION IN THE HORIZONTAL BRIDGMAN CONFIGURATION .2. CONCENTRATED ALLOYS [J].
KADDECHE, S ;
BENHADID, H ;
HENRY, D .
JOURNAL OF CRYSTAL GROWTH, 1994, 141 (1-2) :279-290
[19]  
KAISER N, 2001, IN PRESS J CRYSTAL G
[20]   THE SURFACE TENSION OF LIQUID SILICON AND GERMANIUM [J].
KECK, PH ;
VANHORN, W .
PHYSICAL REVIEW, 1953, 91 (03) :512-513