Microplasmas: Sources, particle kinetics, and biomedical applications

被引：442

作者：

Iza, Felipe ^{[1
,2
]}

Kim, Gon Jun ^{[1
]}

Lee, Seung Min ^{[1
]}

Lee, Jae Koo ^{[1
]}

Walsh, James L. ^{[2
]}

Zhang, Yuantao T. ^{[2
]}

Kong, Michael G. ^{[2
]}

机构：

[1] Pohang Univ Sci & Technol, Dept Elect & Elect Engn, Pohang 790784, South Korea

[2] Loughborough Univ Technol, Dept Elect & Elect Engn, Loughborough LE11 3TU, Leics, England

来源：

PLASMA PROCESSES AND POLYMERS | 2008年 / 5卷 / 04期

基金：

英国工程与自然科学研究理事会;

关键词：

biomedical; electron-energy distribution function (EEDF); ion-energy distribution function (IEDF); microdischarges; microplasmas;

D O I：

10.1002/ppap.200700162

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thanks to their portability and the non-equilibrium character of the discharges, microplasmas are finding application in many scientific disciplines. Although microplasma research has traditionally been application driven, microplasmas represent a new realm in plasma physics that still is not fully understood. This paper reviews existing microplasma sources and discusses charged particle kinetics in various microdischarges. The non-equilibrium character highlighted in this manuscript raises concerns about the accuracy of fluid models and should trigger further kinetic studies of high-pressure microdischarges. Finally, an outlook is presented on the biomedical application of microplasmas.

引用

页码：322 / 344

页数：23

共 218 条

[1] Biofilm destruction by RF high-pressure cold plasma jet [J].