Using FIB-processed AFM cantilevers to determine microtribology characteristics

被引：8

作者：

Ando, Y

Nagashima, T

Kakuta, K

机构：

[1] Mech Engn Lab, Micromechanisms Div, Tsukuba, Ibaraki 3058564, Japan

[2] Chuo Univ, Bunkyo Ku, Tokyo 1128551, Japan

来源：

TRIBOLOGY LETTERS | 2000年 / 9卷 / 1-2期

关键词：

atomic force microscope; wear; contact area; pull-off force; friction force; parallel leaf spring; relative humidity; focused ion beam;

D O I：

10.1023/A:1018892007915

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

Microtribology characteristics were determined by using a combination of single asperities and three types of FIB (focused ion beam)-processed cantilevers for AFM (atomic force microscope). First, single gold asperities were rubbed with single and parallel leaf springs. For the parallel leaf spring, the pull-off force was proportional to the worn area of the gold asperity peak. The total volume of the gold asperity only slightly changed with rubbing. Second, the friction force on a worn asperity was measured by using a double parallel leaf spring, and the results showed that the friction force was proportional to the sum of the normal load and the pull-off force.

引用

页码：15 / 23

页数：9

共 20 条

[11] SURFACE ENERGY AND CONTACT OF ELASTIC SOLIDS [J].

JOHNSON, KL ;

KENDALL, K ;

ROBERTS, AD .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1971, 324 (1558) :301-&

[12]

Kato K, 1997, NEW DIRECTIONS IN TRIBOLOGY, P39

[13] Tribological properties of carbon nitride overcoat for thin-film magnetic rigid disks [J].

Khurshudov, AG ;

Kato, K .

SURFACE & COATINGS TECHNOLOGY, 1996, 86-7 (1-3) :664-671

[14] A fractal analysis of stiction in microelectromechanical systems [J].

Komvopoulos, K ;

Yan, W .

JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1997, 119 (03) :391-400

[15]

LI Y, 1995, T ASME, V117, P279

[16]

Lim M. G., 1990, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), P82, DOI 10.1109/MEMSYS.1990.110254

[17] Quantitative wear analysis using atomic force microscopy [J].

Schöfer, J ;

Santner, E .

WEAR, 1998, 222 (02) :74-83

[18] SLIDING FRICTION UNDER A NEGATIVE LOAD [J].

SKINNER, J ;

GANE, N .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1972, 5 (11) :2087-&

[19]

Tai Y.-C., 1989, Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), P1, DOI 10.1109/MEMSYS.1989.77950

[20] Pole tip recession studies of thin-film rigid disk head sliders - I. Mechanisms of pole tip recession growth [J].

Xu, JG ;

Bhushan, B .

WEAR, 1998, 219 (01) :16-29

← 1 2 →