Sputtering: survey of observations and derived principles

被引：55

作者：

Baragiola, RA ^{[1
]}

机构：

[1] Univ Virginia, Lab Atom & Surface Phys, Charlottesville, VA 22904 USA

来源：

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 2004年 / 362卷 / 1814期

关键词：

sputtering; atomic collisions; surfaces; SIMS; depth profiling;

D O I：

10.1098/rsta.2003.1301

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We review the most salient observations and physical principles of knock-on and electronic sputtering and the role of sputtering in several astrophysical settings and applications in research and technology. In addition, we emphasize some unsolved problems, propose experiments and provide guides to representative literature reviews and significant recent publications.

引用

页码：29 / 53

页数：25

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