Commercial coated conductor fabrication based on inclined substrate deposition

被引:36
作者
Prusseit, W [1 ]
Sigl, G
Nemetschek, R
Hoffmann, C
Handke, J
Lümkemann, A
Kinder, H
机构
[1] THEVA Dunnschichttech GmbH, D-85737 Ismaning, Germany
[2] Tech Univ Munich, Dept Phys, D-85748 Garching, Germany
关键词
coated conductors; evaporation; inclined substrate deposition; superconductor films;
D O I
10.1109/TASC.2005.847680
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Due to the complex layered architecture the fabrication of coated condutors consists of a multitude of processing steps. We present a viable and economic route to produce second generation HTS tape from the initial substrate preparation to the final metal coating. The most important and technically challenging steps are the deposition of an oriented buffer layer and the superconductor film in a reel to reel configuration. New evaporation techniques have been developed to enable reliable, high rate tape coating. Highly oriented MgO-buffer layers are realized by inclined substrate deposition (ISD) yielding an in-plane orientation of 7 degrees-8 degrees FWHM and critical current densities up to 2.5 MA/cm(2). Buffered tape has been fabricated up to 40 m length. The subsequent HTS deposition has been performed up to 12 m and reaches current levels of 200 A/cm. High resolution critical current scans help to reveal defects and to track problems in the manufacturing process.
引用
收藏
页码:2608 / 2610
页数:3
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