Diamond and amorphous carbon MEMS

被引：86

作者：

Sullivan, JP

Friedmann, TA

Hjort, K

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

[2] Univ Uppsala, Dept Mat Sci, Angstrom Lab, S-75121 Uppsala, Sweden

来源：

MRS BULLETIN | 2001年 / 26卷 / 04期

关键词：

D O I：

10.1557/mrs2001.68

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：309 / 311

页数：3

共 25 条

[1]

ASLAM M, 1995, TRANSD 95 EUR STOCKH, V9

[2]

Auciello O, 2000, MATER RES SOC SYMP P, V605, P73

[3] Diamond microstructures for optical micro electromechanical systems [J].

Björkman, H ;

Rangsten, P ;

Hjort, K .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 78 (01) :41-47

[4] Diamond replicas from microstructured silicon masters [J].

Björkman, H ;

Rangsten, P ;

Hollman, P ;

Hjort, K .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 73 (1-2) :24-29

[5] Surface micromachined diamond microswitch [J].

Ertl, S ;

Adamschik, M ;

Schmid, P ;

Gluche, P ;

Flöter, A ;

Kohn, E .

[6] Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond [J].

Friedmann, TA ;

Sullivan, JP ;

Knapp, JA ;

Tallant, DR ;

Follstaedt, DM ;

Medlin, DL ;

Mirkarimi, PB .

APPLIED PHYSICS LETTERS, 1997, 71 (26) :3820-3822

[7]

GARDOS MN, 1998, TRIBOLOGY ISSUES OPP, P341

[8] FABRICATION OF SINGLE-CRYSTAL DIAMOND MICROCOMPONENTS [J].

HUNN, JD ;

WITHROW, SP ;

WHITE, CW ;

CLAUSING, RE ;

HEATHERLY, L ;

CHRISTENSEN, CP .

APPLIED PHYSICS LETTERS, 1994, 65 (24) :3072-3074

[9] Micromachined pattern transfer into CVD diamond [J].

Jubber, MG ;

McLaughlin, AJ ;

Marsh, JH ;

Aitchison, JS ;

John, P ;

Troupe, CE ;

Wilson, JIB .

[10] A novel low-field electron-emission polycrystalline diamond microtip array for sensor applications [J].

Kang, WP ;

Davidson, JL ;

Li, Q ;

Xu, JF ;

Kinser, DL ;

Kerns, DV .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 54 (1-3) :724-727

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