Aligned single-walled carbon nanotube patterns with nanoscale width, micron-scale length and controllable pitch

被引:25
作者
Li, Sai
Liu, Ningyi
Chan-Park, Mary B.
Yan, Yehai
Zhang, Qing
机构
[1] Nanyang Technol Univ, Sch Chem & Biol Engn, Singapore 639798, Singapore
[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
关键词
D O I
10.1088/0957-4484/18/45/455302
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have successfully aligned single-walled carbon nanotubes (SWNTs) in patterns with nanoscale width, micron-scale length and controllable pitch on SiO2/Si substrates using a poly(dimethysiloxane) (PDMS) microchannel mold. The microchanneled mold was patterned with a funnel-shaped channel to minimize nanotube jamming during capillary-driven inflow. Two (i.e.pre- and post-capillary) gas blows were employed to improve nanotube alignment. The fluidically pre-aligned carbon nanotubes were 'gas-spun' into a long 20 nm wide pattern, significantly narrower than the fluidic pre-alignment channel. These narrow and long aligned SWNT patterns were successfully transferred to a pair of gold electrodes spaced 15 mu m apart. The performance of the carbon nanotube field effect transistor (CNTFET) fabricated by this technique was evaluated.
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页数:7
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