Fabrication and characterization of low turn-on voltage carbon nanotube field emission triodes

被引:4
作者
Cheng, HC [1 ]
Chen, KJ
Hong, WK
Tantair, FG
Lin, CP
Chen, KH
Chen, LC
机构
[1] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu, Taiwan
[2] Natl Chiao Tung Univ, Inst Elect, Hsinchu 30039, Taiwan
[3] Acad Sinica, Inst Atom & Mol Sci, Taipei, Taiwan
[4] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 10764, Taiwan
关键词
D O I
10.1149/1.1381349
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Based on selective growth, carbon nanotubes (CNTs) for low turn-on voltage field emission triodes have been grown via microwave plasma-enhanced chemical vapor deposition. The triode devices fabricated with standard integrated circuit process contain 4 x 4 emitting cells with extraction gates and each individual cell is 4 mum in diameter. With the phosphor-coated indium tin oxide glass as the anode away from the CNTs triodes with similar to1 mm above, the triode devices achieved low turn-on gate voltage of 30 V and high emission current density of 0.7 A/cm(2) at 50 V. The results exhibit CNTs for potential application in field emission display. (C) 2001 The Electrochemical Society.
引用
收藏
页码:H15 / H17
页数:3
相关论文
共 10 条
[1]   Field emission from single-wall carbon nanotube films [J].
Bonard, JM ;
Salvetat, JP ;
Stockli, T ;
de Heer, WA ;
Forro, L ;
Chatelain, A .
APPLIED PHYSICS LETTERS, 1998, 73 (07) :918-920
[2]  
CHAHAMALA BR, 2000, IEEE CIRCUITS DEVICE, V16, P19
[3]   A simple and robust electron beam source from carbon nanotubes [J].
Collins, PG ;
Zettl, A .
APPLIED PHYSICS LETTERS, 1996, 69 (13) :1969-1971
[4]   A CARBON NANOTUBE FIELD-EMISSION ELECTRON SOURCE [J].
DEHEER, WA ;
CHATELAIN, A ;
UGARTE, D .
SCIENCE, 1995, 270 (5239) :1179-1180
[5]   The carbon-nanotube based field-emission displays for future large and full color displays [J].
Lee, NS ;
Choi, WB ;
Yi, WK ;
Jin, YW ;
Choi, YS ;
Jung, JE ;
You, SG ;
You, JH ;
Lee, CG ;
Cho, SH ;
Kim, JM .
MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS, 2000, :124-127
[6]   Synthesis of large arrays of well-aligned carbon nanotubes on glass [J].
Ren, ZF ;
Huang, ZP ;
Xu, JW ;
Wang, JH ;
Bush, P ;
Siegal, MP ;
Provencio, PN .
SCIENCE, 1998, 282 (5391) :1105-1107
[7]  
TANTAIR FG, 2000, J VAC SCI TECHNOL B, V18, P1207
[8]   Field emission from nanotube bundle emitters at low fields [J].
Wang, QH ;
Corrigan, TD ;
Dai, JY ;
Chang, RPH ;
Krauss, AR .
APPLIED PHYSICS LETTERS, 1997, 70 (24) :3308-3310
[9]   HELICAL AND ROTATIONAL SYMMETRIES OF NANOSCALE GRAPHITIC TUBULES [J].
WHITE, CT ;
ROBERTSON, DH ;
MINTMIRE, JW .
PHYSICAL REVIEW B, 1993, 47 (09) :5485-5488
[10]   Electronic structure of atomically resolved carbon nanotubes [J].
Wildöer, JWG ;
Venema, LC ;
Rinzler, AG ;
Smalley, RE ;
Dekker, C .
NATURE, 1998, 391 (6662) :59-62