Mechanisms for O2 dissociation during pulsed-laser ablation and deposition

被引:26
作者
Camposeo, A [1 ]
Cervelli, F [1 ]
Fuso, F [1 ]
Allegrini, M [1 ]
Arimondo, E [1 ]
机构
[1] Univ Pisa, Dipartimento Fis, Ist Nazl Fis Mat, I-56127 Pisa, Italy
关键词
D O I
10.1063/1.1366363
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigate different dissociation mechanisms for O-2 gas during pulsed-laser ablation and deposition. Mesaurements are carried out by using an in situ diagnostics based on absorption spectroscopy of oxygen gas, with space- and time-resolved capabilities, during laser ablation of a metal alloy target in the presence of an oxygen environment. Data, analyzed as a function of ablation parameters, indicate that two different mechanisms, involving electron collisions and formation of a high-density, high-temperature shock layer, play an important role in producing atomic oxygen which can subsequently react with the ablated species. (C) 2001 American Institute of Physics.
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页码:2402 / 2404
页数:3
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