Polytypoid structures in annealed In2O3-ZnO films

被引：68

作者：

Yan, Y

Pennycook, SJ

Dai, J

Chang, RPH

Wang, A

Marks, TJ

机构：

[1] Oak Ridge Natl Lab, Div Solid State, Oak Ridge, TN 37831 USA

[2] Northwestern Univ, Mat Res Ctr, Evanston, IL 60208 USA

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 18期

关键词：

D O I：

10.1063/1.122513

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Atomic-resolution Z-contrast images demonstrate unambiguously that the annealed, metalorganic chemical vapor deposition derived transparent In2O3-ZnO films have a polytypoid microstructure, consisting of ZnO slabs of variable width separated by single In-O octahedral layers. These In-O layers induce a polarity inversion in the two adjacent ZnO layers, which is reversed again by a mirror domain boundary inside each ZnO slab. (C) 1998 American Institute of Physics. [S0003-6951(98)01444-2].

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页码：2585 / 2587

页数：3

相关论文

共 14 条

[1] NEW INTERGROWTH PHASES IN THE ZNO-IN2O3 SYSTEM [J].

CANNARD, PJ ;

TILLEY, RJD .

JOURNAL OF SOLID STATE CHEMISTRY, 1988, 73 (02) :418-426

[2] TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].

CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

THIN SOLID FILMS, 1983, 102 (01) :1-46

[3] STRUCTURE OF INDIUM IRON-OXIDE [J].

GIAQUINTA, DM ;

DAVIS, WM ;

ZURLOYE, HC .

ACTA CRYSTALLOGRAPHICA SECTION C-CRYSTAL STRUCTURE COMMUNICATIONS, 1994, 50 :5-7

[4]

HAMBERG I, 1986, J APPL PHYS, V60, P123

[5] NEUARTIGE PHASEN MIT WURTZITAHNLICHEN STRUKTUREN IM SYSTEM ZNO-IN2O3 [J].

KASPER, H .

ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1967, 349 (3-4) :113-&

[6] SYNTHESES AND SINGLE-CRYSTAL DATA OF HOMOLOGOUS COMPOUNDS, IN2O3(ZNO)(M) (M=3, 4, AND 5), INGAO3(ZNO)(3), AND GA2O3(ZNO)(M) (M=7, 8, 9, AND 16) IN THE IN2O3-ZNGA2O4-ZNO SYSTEM [J].

KIMIZUKA, N ;

ISOBE, M ;

NAKAMURA, M .

JOURNAL OF SOLID STATE CHEMISTRY, 1995, 116 (01) :170-178

[7] Preparation of transparent and conductive In2O3-ZnO films by radio frequency magnetron sputtering [J].

Minami, T ;

Kakumu, T ;

Takata, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (03) :1704-1708

[8] HIGHLY TRANSPARENT AND CONDUCTIVE ZN2IN2O5 THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].

MINAMI, T ;

SONOHARA, H ;

KAKUMU, T ;

TAKATA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1995, 34 (8A) :L971-L974

[9]

Minami T., 1984, JPN J APPL PHYS, V23, P280

[10]

Moriga T, 1998, J AM CERAM SOC, V81, P1310, DOI 10.1111/j.1151-2916.1998.tb02483.x