Proton beam micromachining on PMMA, Foturan and CR-39 materials

被引：26

作者：

Rajta, I

Gómez-Morilla, I

Abraham, MH

Kiss, AZ

机构：

[1] Hungarian Acad Sci, Inst Nucl Res, H-4001 Debrecen, Hungary

[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2003年 / 210卷

关键词：

proton beam micromachining; PMMA; Foturan; CR-39;

D O I：

10.1016/S0168-583X(03)01025-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper we investigate further the potential of proton beam micromachining (PBM) on three different materials: the polymers PMMA and CR-39, and the photowritable glass Foturan. A focused beam of 2 MeV protons delivered by the nuclear microprobe of ATOMKI was used to pattern these materials. The parameters of PBM and the obtained structures are presented. (C) 2003 Elsevier B.V. All rights reserved.

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页码：260 / 265

页数：6

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