Ion beam dose measurement in nuclear microprobe using a compact beam chopper

被引：37

作者：

Bartha, L ^{[1
]}

Uzonyi, I ^{[1
]}

机构：

[1] Hungarian Acad Sci, Inst Nucl Res, ATOMKI, H-4001 Debrecen, Hungary

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 161卷

关键词：

scanning nuclear microprobe; ion beam dose; compact beam chopper;

D O I：

10.1016/S0168-583X(99)00924-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The accurate measurement of ion beam dose is a key point of quantitative analytical methods like PIGE, PIXE or RES. To solve this problem for our Oxford-type scanning nuclear microprobe (SNM), a small-sized compact beam chopper has been developed. Ion beam dose is derived from the observed RES yield from the surface of a wing after calibrating the yield versus collected charge. The wing is rotated by a stepper motor and is optionally covered with foils made of Al, Ni or Au. The beam chopper is capable to measure ion beam doses for different ions at a wide range of energy and current with a precision in the order of 1%. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：339 / 343

页数：5

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