Cathodoluminescence of ZnO films

被引:94
作者
Fu, ZX [1 ]
Guo, CX [1 ]
Lin, BX [1 ]
Liao, GH [1 ]
机构
[1] Univ Sci & Technol China, Dept Phys, Hefei 230026, Peoples R China
来源
CHINESE PHYSICS LETTERS | 1998年 / 15卷 / 06期
关键词
D O I
10.1088/0256-307X/15/6/025
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The cathodoluminescence of ZnO films deposited on Si substrates by reactive de sputtering is investigated. Apart from the characteristic green emission band (522 nm) of ZnO, an ultraviolet (392 nm) band and a blue (430-460 nm) band have been observed. The x-ray diffraction and cathodoluminescent spectra reveal the dependences of the luminescence on the preparation conditions and crystallinity of the ZnO films.
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页码:457 / 459
页数:3
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