Defect-induced optical absorption in CVD diamond films

被引:39
作者
Nesladek, M [1 ]
Vanecek, M [1 ]
Stals, LM [1 ]
机构
[1] ACAD SCI CZECH REPUBL, INST PHYS, CR-16200 PRAGUE, CZECH REPUBLIC
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1996年 / 154卷 / 01期
关键词
D O I
10.1002/pssa.2211540121
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Photothermal deflection spectroscopy (PDS) was used to study defect-induced optical absorption in CVD diamond films. PDS has shown very high sensitivity, allowing to measure absorbance values down to 10(-5) level. Moreover, PDS is significantly less sensitive to elastic light scattering than optical transmission measurements. Based on PDS data, it is shown that undoped polycrystalline and homoepitaxial diamond Films exhibit a very characteristic subgap absorption, which is ascribed to electronic transitions between pi --> pi* states, appearing in the gap and due to the presence of amorphous carbon. The incorporation of N (and H and O) atoms in diamond films was studied. The optical absorption of N-doped films is compared with the optical absorption due to single substitutional N in Ib synthetic diamond. The incorporation of Li by in-situ doping with organo-metallic compounds during Film growth is discussed and the observed transitions are tentatively explained. Finally, a mathematical model for the characteristic subgap absorption is described and the experimentally obtained optical absorption coefficients are deconvoluted to obtain parameters for the description of the density of gap states.
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页码:283 / 303
页数:21
相关论文
共 75 条
[1]  
AMER NM, 1984, SEMICONDUCT SEMIMET, V21, P83
[2]   N-TYPE DOPANTS AND CONDUCTION-BAND ELECTRONS IN DIAMOND - CLUSTER MOLECULAR-ORBITAL THEORY [J].
ANDERSON, AB ;
MEHANDRU, SP .
PHYSICAL REVIEW B, 1993, 48 (07) :4423-4427
[3]  
ARMATUNGA GAJ, 1995, DIAM RELAT MATER, V4, P637
[4]   TOWARDS A GENERAL CONCEPT OF DIAMOND CHEMICAL VAPOR-DEPOSITION [J].
BACHMANN, PK ;
LEERS, D ;
LYDTIN, H .
DIAMOND AND RELATED MATERIALS, 1991, 1 (01) :1-12
[5]   THE ORIGIN OF THE BROAD-BAND LUMINESCENCE AND THE EFFECT OF NITROGEN DOPING ON THE OPTICAL-PROPERTIES OF DIAMOND FILMS [J].
BERGMAN, L ;
MCCLURE, MT ;
GLASS, JT ;
NEMANICH, RJ .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (05) :3020-3027
[6]   MICROPHOTOLUMINESCENCE AND RAMAN-SCATTERING STUDY OF DEFECT FORMATION IN DIAMOND FILMS [J].
BERGMAN, L ;
STONER, BR ;
TURNER, KF ;
GLASS, JT ;
NEMANICH, RJ .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (08) :3951-3957
[7]   THERMOOPTICAL SPECTROSCOPY - DETECTION BY THE MIRAGE EFFECT [J].
BOCCARA, AC ;
FOURNIER, D ;
BADOZ, J .
APPLIED PHYSICS LETTERS, 1980, 36 (02) :130-132
[8]   INFLUENCE OF PI-BONDED CLUSTERS ON THE ELECTRONIC-PROPERTIES OF DIAMOND-LIKE CARBON-FILMS [J].
BOUNOUH, Y ;
THEYE, ML ;
DEHBIALAOUI, A ;
MATTHEWS, A ;
CERNOGORA, J ;
FAVE, JL ;
COLLIEX, C ;
GHEORGHIU, A ;
SENEMAUD, C .
DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) :259-265
[9]   ELECTRONIC-PROPERTIES OF AMORPHOUS-CARBON FILMS [J].
BREDAS, JL ;
STREET, GB .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1985, 18 (21) :L651-L655
[10]   THEORY OF IMPURITIES IN DIAMOND [J].
BRIDDON, PR ;
JONES, R .
PHYSICA B-CONDENSED MATTER, 1993, 185 (1-4) :179-189