Role of oxygen desorption during vacuum annealing in the improvement of electrical properties of aluminum doped zinc oxide films synthesized by sol gel method

被引：32

作者：

Zhu, Mingwei

Huang, Hui

Gong, Jun

Sun, Chao

Jiang, Xin

机构：

[1] Chinese Acad Sci, Inst Met Res, Shenyang, Peoples R China

[2] Univ Siegen, Inst Mat Engn, D-57076 Siegen, Germany

来源：

JOURNAL OF APPLIED PHYSICS | 2007年 / 102卷 / 04期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1063/1.2772591

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Aluminum doped zinc oxide (ZAO) films were prepared by sol gel dip-coating process. Several annealing treatments were carried out to improve the conductivity of ZAO films. The results show that the annealing temperature and the cooling rate have significant effects on the resistivity of ZAO films. A minimum resistivity of 5.97x10(-3) Omega cm with the transmission in visible light region above 85% can be obtained after vacuum annealing. The desorption of oxygen that is chemisorbed on the surface and at the grain boundary is thought to be responsible for the observed improvement.

引用

页数：6

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