Pt-coated InN nanorods for selective detection of hydrogen at room temperature

被引:51
作者
Kryliouk, O [1 ]
Park, HJ
Wang, HT
Kang, BS
Anderson, TJ
Ren, F
Pearton, SJ
机构
[1] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2005年 / 23卷 / 05期
基金
美国国家科学基金会;
关键词
D O I
10.1116/1.2008268
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Single crystal InN nanorods were successfully grown on c-Al2O3 by hydride-metalorganic vapor phase epitaxy. The measured resistance of bare InN nanorods does not change upon exposure to hydrogen ambient. The addition of sputter-deposited clusters of Pt onto the surface of the InN nanorods, however, produced a significant change in the measured room temperature resistance. The measured resistance changed systematically by 0.5%-12% as the ambient hydrogen concentration in N-2 was varied between 10 and 250 ppm after 15 min exposure time. Importantly, a relatively low power consumption of similar to 0.3 mW was measured under these conditions. There was no response at room temperature to O-2, N2O, or NH3 exposures. (c) 2005 American Vacuum Society.
引用
收藏
页码:1891 / 1894
页数:4
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