Wettability enhancement by rough surfaces generated by thin film technology

被引:84
作者
Uelzen, T [1 ]
Müller, J [1 ]
机构
[1] Tech Univ Hamburg, Dept Micro Syst Technol, D-21073 Hamburg, Germany
关键词
surface roughness; wetting; sputtering; tin;
D O I
10.1016/S0040-6090(03)00484-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Wettability is a very important property of surfaces, especially in microsystem applications. It can be manipulated directly by surface properties-especially by the roughness of the surface. The wettability of smooth hydrophilic surfaces is improved by L roughening them. The contrary effect is observed with smooth hydrophobic surfaces-by roughening, the contact angle will increase. In this article, a thin film process with excellent edge coverage is demonstrated. A sputtered tin (Sri) layer forms a reproducible. well-defined rough surface with an average roughness of approximately 188 nm. Wettability can be manipulated in a wide range with a Wenzel-relation of approximately r = 2.6. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:311 / 315
页数:5
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