共 29 条
[5]
APPLICATION OF LEAD-ZIRCONATE-TITANATE THIN-FILM DISPLACEMENT SENSORS FOR THE ATOMIC-FORCE MICROSCOPE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1995, 13 (03)
:1119-1122
[8]
HUGHES G, 1999, THESIS U MINNESOTA T
[10]
A self-actuating PZT cantilever integrated with piezoresistor sensor for AFM with high speed parallel operation
[J].
FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,
2002,
:689-692