Modeling and simulation of a condenser microphone

被引：29

作者：

Chen, Jen-Yi ^{[1
]}

Hsu, Yu-Chun ^{[1
]}

Lee, Shu-Sheng ^{[2
]}

Mukherjee, Tamal ^{[3
]}

Fedder, Gary K. ^{[3
]}

机构：

[1] Ind Technol Res Inst, Microsyst Technol Ctr, Sect 4, Hsinchu 310, Taiwan

[2] Natl Taiwan Ocean Univ, Dept Syst & Naval Architecture Engn, Chilung, Taiwan

[3] Carnegie Mellon Univ, Dept Elect & Comp Engn, Inst Robot, Pittsburgh, PA 15213 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 145卷 / 1-2期

关键词：

condenser microphone; microphone model; system level simulation; co-simulation;

D O I：

10.1016/j.sna.2007.12.011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

A nodal analysis model of a condenser microphone has been implemented in an IC design environment. The fundamental characteristics, including sensitivity, frequency response and output referred noise are obtained by co-simulation with the microphone and the readout circuit using Cadence/Spectre (R) simulator. The new model is capable of dealing with the multi-field coupling effects including acoustical, mechanical and electrostatic behavior. Both the numerical analysis and measured data agree with the nodal simulation results. In addition, the implemented readout circuit shows good performance of interfacing a condenser microphone with 63 dB SNR and -35 dBV/Pa sensitivity. Co-simulating the microphone and readout circuit, enables trade-off analysis between the acoustical-electro-mechanical and electronic design parameters. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：224 / 230

页数：7

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