共 31 条
[24]
SOMEKH RE, 1984, J VAC SCI TECHNOL A, V2, P1285, DOI 10.1116/1.572396
[25]
Study on crystallinity of tin-doped indium oxide films deposited by DC magnetron sputtering
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1998, 37 (4A)
:1870-1876
[27]
Tahar RBH, 1998, J APPL PHYS, V83, P2631, DOI 10.1063/1.367025
[28]
ENERGETIC PARTICLES IN THE SPUTTERING OF AN INDIUM TIN OXIDE TARGET
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (04)
:1435-1438
[29]
van der Pauw L. J., 1958, PHILIPS RES REP, V13, P1, DOI 10.1142/9789814503464_0017