Development of high spatial resolution X-ray CT system at BL47XU in SPring-8

被引：98

作者：

Uesugi, K

Suzuki, Y

Yagi, N

Tsuchiyama, A

Nakano, T

机构：

[1] Osaka Univ, Osaka 5600043, Japan

[2] Geol Survey Japan, Tsukuba, Ibaraki 3058567, Japan

[3] SPring8, Mikazuki, Hyogo 6795198, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2001年 / 467卷

关键词：

micro-tomography; spatial resolution; texture; SPring-8;

D O I：

10.1016/S0168-9002(01)00491-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

High spatial resolution, micrometer range, X-ray CT system has been developed at SPring-8. The experiments were performed at the undulator beam line BL47XU. An "in-vacuum type" undulator is employed as an X-ray source, and the X-rays are monochromatized with a liquid nitrogen cooled Si(1 1 1) double crystal monochromator. High precision rotation stage with air bearing was used for sample rotation. The transmitted images were obtained with a twodimensional image detector. which consists of a single crystal phosphor screen (Lu2SiO5:Ce). an objective lens and a cooled CCD camera. In this system the smallest effective pixel size was set to 0.5 mum x 0.5 mum. As a result of the experiments, three-dimensional images of a few micrometer-order texture has been successfully obtained with the developed CT system. (C) 2001 Elsevier Science B.V, All rights reserved.

引用

页码：853 / 856

页数：4

共 6 条

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