The electromechanical behavior of nichrome (80/20 wt.%) film

被引：63

作者：

Kazi, IH ^{[1
]}

Wild, PM

Moore, TN

Sayer, M

机构：

[1] Queens Univ, Dept Engn Mech, Kingston, ON K7L 3N6, Canada

[2] Queens Univ, Dept Phys, Kingston, ON K7L 3N6, Canada

来源：

THIN SOLID FILMS | 2003年 / 433卷 / 1-2期

关键词：

annealing; gauge factor; sheet resistance; sputtering; strain gauge; TCR; thin film;

D O I：

10.1016/S0040-6090(03)00390-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The application of thin films in strain gauge technology is well established and nichrome (Ni-Cr 80/20 wt.%) is a commonly used material for application in thin film strain gauges. In the present work, the electromechanical properties of RF sputtered nichrome film have been investigated experimentally for strain gauge applications. The sheet resistance, gauge factor and the temperature coefficient of resistance (TCR) have been investigated and their dependence on film thickness studied. The TCR has been found to vary with temperature. Annealing has been found to decrease the film resistance and increase the TCR. The gauge factor is compared with previously reported results and the differences are discussed. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：337 / 343

页数：7

共 9 条

[1] LONGITUDINAL AND TRANSVERSE STRAIN SENSITIVITY OF NICHROME FILMS [J].

ANGADI, MA ;

WHITING, R .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1990, 7 (1-2) :L1-L4

[2] FABRICATION OF A THIN-FILM STRAIN-GAUGE TRANSDUCER USING BI2O3-V2O5 [J].

ARSHAK, K ;

PERREM, R .

SENSORS AND ACTUATORS A-PHYSICAL, 1993, 36 (01) :73-76

[3]

Heavens OS, 1970, THIN FILM PHYS, P110

[4]

Kato Y, 1993, SPECIAL PUBLICATIONS, V948, P95

[5] HIGH-TEMPERATURE THIN-FILM STRAIN-GAUGES [J].

KAYSER, P ;

GODEFROY, JC ;

LECA, L .

SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :328-332

[6]

Koglin H. J., 1985, CIGREI FAC S PLANN O, P237

[7]

MOKOROV YA, 1995, TELECOMM RADIO ENG, V49, P59

[8]

NAYAK MM, 1990, THIN SOLID FILMS, V194, P1023

[9] ELECTROMECHANICAL PROPERTIES OF THIN-FILMS AND THIN-FILM STRAIN GAUGE [J].

WITT, GR .

THIN SOLID FILMS, 1974, 22 (02) :133-156

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