Characterization of lead lanthanum titanate thin films grown on fused quartz using MOCVD

被引:29
作者
Chen, HY
Lin, J
Tan, KL
Feng, ZC
机构
[1] NATL UNIV SINGAPORE,DEPT PHYS,SINGAPORE 119260,SINGAPORE
[2] EMCORE CORP,SOMERSET,NJ 08873
关键词
chemical vapour deposition; Fourier transform infrared spectroscopy; Raman scattering; X-ray diffraction; X-ray photoelectron spectroscopy;
D O I
10.1016/S0040-6090(96)08874-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Lead lanthanum titanate (Pb1-xLax)TiO3 thin films grown on a fused quartz matrix using the metal-organic chemical vapor deposition (MOCVD) were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD),Raman scattering spectroscopy (RSS) and diffuse reflectance infrared Fourier transform spectroscopy (DRIFTS) techniques. XPS results confirmed the film composition of (Pb1-xLax)TiO3 and lanthanum enrichment in top surface layers. XRD study shows that a polycrystalline lead titanate PbTiO3 film can be grown on fused quartz using MOCVD. For lead lanthanum titanate (Pb1-xLax)TiO3 films, a preferred (100) orientation for the films with x values around 0.05-0.17 is observed in XRD patterns, whereas the film with an x value above 0.319 has randomly distributed orientations. A gradual change in the crystal structure moving from tetragonal to cubic arrangement with increasing La concentration is also noted. The shifts of the E(TO) soft mode band in RSS spectra, which depend on temperature are governed by the formula of omega=A omega(o)\T-T-o\(1/2). Infrared vibration absorption bands at 667, 826, 936 and 529 cm(-1) were observed and attributed to Ti-O and Pb-O stretching vibrations while a band around 500 cm(-1) was related to the lanthanum-oxygen stretching vibration in the films, indicating a stronger La-O bonding strength in the film than in its typical oxide, La2O3.
引用
收藏
页码:59 / 64
页数:6
相关论文
共 29 条
[1]   FERROELECTRIC (PB,LA)(ZR,TI)O3 EPITAXIAL THIN-FILMS ON SAPPHIRE GROWN BY RF-PLANAR MAGNETRON SPUTTERING [J].
ADACHI, H ;
MITSUYU, T ;
YAMAZAKI, O ;
WASA, K .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) :736-741
[2]  
ADAMS DM, 1967, METAL LIGAND RELATED
[3]   AUGER AND X-RAY PHOTOELECTRON SPECTROSCOPIC AND ELECTROCHEMICAL CHARACTERIZATION OF TITANIUM THIN-FILM ELECTRODES [J].
ARMSTRONG, NR ;
QUINN, RK .
SURFACE SCIENCE, 1977, 67 (02) :451-468
[4]   RAMAN STUDIES OF UNDERDAMPED SOFT MODES IN PBTIO3 [J].
BURNS, G ;
SCOTT, BA .
PHYSICAL REVIEW LETTERS, 1970, 25 (03) :167-&
[5]   LATTICE MODES IN FERROELECTRIC PEROVSKITES - PBTIO3 [J].
BURNS, G ;
SCOTT, BA .
PHYSICAL REVIEW B, 1973, 7 (07) :3088-3101
[6]   CRYSTALLIZATION OF SOL-GEL DERIVED LEAD ZIRCONATE TITANATE THIN-FILMS [J].
DANA, SS ;
ETZOLD, KF ;
CLABES, J .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) :4398-4403
[7]  
Emsberger C., 1985, J VAC SCI TECHNOL A, V3, P2415
[8]   RAMAN-SCATTERING AND X-RAY-DIFFRACTION INVESTIGATIONS OF HIGHLY TEXTURED (PB1-XLAX)TIO3 THIN-FILMS [J].
FENG, ZC ;
KWAK, BS ;
ERBIL, A ;
BOATNER, LA .
APPLIED PHYSICS LETTERS, 1994, 64 (18) :2350-2352
[9]   DIFFERENCE RAMAN-SPECTRA OF PBTIO3 THIN-FILMS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
FENG, ZC ;
KWAK, BS ;
ERBIL, A ;
BOATNER, LA .
APPLIED PHYSICS LETTERS, 1993, 62 (04) :349-351
[10]  
Ferraro J.R., 1971, Low-Frequency Vibrations of Inorganic and Coordination Compounds