Scanning probe microscopy investigation of nanometer structures produced by irradiation with 200 MeV ions

被引：15

作者：

Biro, LP

Gyulai, J

Havancsak, K

机构：

[1] KFKI, Res Inst Mat Sci, H-1525 Budapest, Hungary

[2] Eotvos Lorand Univ, Inst Solid State Phys, H-1088 Budapest, Hungary

来源：

VACUUM | 1998年 / 50卷 / 3-4期

基金：

匈牙利科学研究基金会;

关键词：

D O I：

10.1016/S0042-207X(98)00051-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanometer size structures created by irradiation with 215 MeV Ne, and 209 MeV Kr ions on the surface of muscovite mica (MM), highly oriented pyrolitic graphite (HOPG), and single crystal Si were investigated by scanning tunnelling microscopy (STM), and atomic force microscopy (AFM). The comparison of the structures observed on these three materials shows that: (i) high energy heavy ions are suitable to produce well individualised, nanometer size structures without any further developing process being needed; and (ii) the character of the structures can be "tailored" to a certain extent by using different target-ion combinations, and different angles of incidence. The layered nature of MM and HOPG make these materials particularly suitable for the creation of various nanometer size structures, their behaviour being more close to each other than to the covalent Si (C) 1998 Elsevier Science Ltd. All rights reserved.

引用

收藏

页码：263 / 272

页数：10

相关论文

共 32 条

[1] Ion track diameters in mica studied with scanning force microscopy [J].

Ackermann, J ;

Angert, N ;

Neumann, R ;

Trautmann, C ;

Dischner, M ;

Hagen, T ;

Sedlacek, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 107 (1-4) :181-184

[2] Interfacial effects during ion beam processing of metals [J].

Averback, RS ;

Ghaly, M ;

Bellon, P .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1996, 37 (1-3) :38-48

[3] A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].

BIERSACK, JP ;

HAGGMARK, LG .

NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269

[4] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[5] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY [J].

BINNING, G ;

ROHRER, H ;

GERBER, C ;

WEIBEL, E .

PHYSICAL REVIEW LETTERS, 1982, 49 (01) :57-61

[6] SCANNING-TUNNELING-MICROSCOPE INVESTIGATION OF A 215-MEV NE-IRRADIATED GRAPHITE SURFACE [J].

BIRO, LP ;

GYULAI, J ;

HAVANCSAK, K .

PHYSICAL REVIEW B, 1995, 52 (03) :2047-2053

[7] New method based on atomic force microscopy for in-depth characterization of damage in Si irradiated with 209 MeV Kr [J].

Biro, LP ;

Gyulai, J ;

Havancsak, K ;

Didyk, AY ;

Bogen, S ;

Frey, L ;

Ryssel, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 122 (03) :559-562

[8] Atomic scale investigation of surface modification induced by 215 MeV Ne irradiation on graphite [J].

Biro, LP ;

Gyulai, J ;

Havancsak, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 112 (1-4) :270-274

[9] Comparison of damage produced by 209 MeV Kr irradiation in muscovite mica, graphite and silicon [J].

Biro, LP ;

Gyulai, J ;

Havancsak, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 122 (03) :476-480

[10] In-depth damage distribution by scanning probe methods in targets irradiated with 200 MeV ions [J].

Biro, LP ;

Gyulai, J ;

Havancsak, K ;

Didyk, AY ;

Frey, L ;

Ryssel, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 :32-37

← 1 2 3 4 →