New micromachined microstrip transmission lines for application in millimeter-wave circuits

被引：9

作者：

Lee, HS ^{[1
]}

Kim, SC ^{[1
]}

Lim, BO ^{[1
]}

Kim, KM ^{[1
]}

Uhm, WY ^{[1
]}

Chun, YH ^{[1
]}

Shin, DH ^{[1
]}

Kim, SK ^{[1
]}

Park, HC ^{[1
]}

Rhee, JK ^{[1
]}

机构：

[1] Dongguk Univ, Millimeter Wave Innovat Technol Res Ctr, Joong Gu, Seoul 100715, South Korea

来源：

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2004年 / 40卷 / 01期

关键词：

RF MEMS; surface micromachining; microstrip line; airbridge; DAML;

D O I：

10.1002/mop.11270

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

In this paper, we describe a new GaAs-based micromachined microstrip line, supported by an electrically supported air-gapped microstrip line (DAML) structure and developed using RF MEMS techniques to achieve low losses at millimeter-wavefrequency bands with wide impedance ranges. The measured DAML with a 10-mum post height shows less than 1.5-dB/cm attenuation at 50 GHz with 20-100Omega, which agrees well with the simulated results. (C) 2004 Wiley Periodicals, Inc.

引用

页码：6 / 9

页数：4

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