共 23 条
- [1] *ASTM, 1995, 123995 ASTM C
- [3] Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 83 (1-3): : 42 - 47
- [4] DOWLING NE, 1999, MECH BEHAV MAT, P803
- [6] Johnson C.A., 1991, Eng. Mater. Handb., V4, P709
- [7] Johnson G. T., 2000, P SOC PHOTO-OPT INS, V3874, P94
- [8] JONES PT, 2000, P SOC PHOTO-OPT INS, V3880, P20
- [10] Cross comparison of direct strength testing techniques on polysilicon films [J]. MECHANICAL PROPERTIES OF STRUCTURAL FILMS, 2001, 1413 : 16 - 27