Effect of working pressure on the electrochemical performance of thin film SnO2 microbattery anodes deposited by radio frequency magnetron sputtering

被引：15

作者：

Lee, WH ^{[1
]}

Son, HC

Reucroft, PJ

Lee, JG

Park, JW

机构：

[1] Kookmin Univ, Sch Met & Mat Engn, Seoul 136702, South Korea

[2] Hanyang Univ, Dept Engn Met, Seoul 133791, South Korea

[3] Univ Kentucky, Dept Chem & Mat Engn, Lexington, KY 40506 USA

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 2001年 / 20卷 / 01期

关键词：

D O I：

10.1023/A:1006754413365

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The cycling electrochemical performance studies of sputtered thin SnO2 films, deposited under various working pressures, were investigated. It was found that superior electrochemical charge/discharge characteristics as well as the cycling performance of the thin film SnO2 microbattery anode can be obtained by manipulating the film density and stress. This can be done by controlling the working pressure of the gas mixture during radio frequency magnetron sputtering.

引用

页码：39 / 41

页数：3

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