Nanoimprint fabrication of micro-rings for magnetization reversal studies

被引:26
作者
Chen, Y [1 ]
Lebib, A [1 ]
Li, SP [1 ]
Natali, M [1 ]
Peyrade, D [1 ]
Cambril, E [1 ]
机构
[1] CNRS, Microstruct & Microelect Lab, F-92225 Bagneux, France
关键词
magnetic ring arrays; nanoimprint lithography; tri-layer resist system;
D O I
10.1016/S0167-9317(01)00448-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Submicron magnetic ring arrays are fabricated by nanoimprint lithography and lift-off with a tri-layer resist system. Under normal imprint conditions, ring patterns can be replicated one-by-one from the mold and transferred by lift-off with a Co layer thickness varying in the range of 10-100 nm. The in-plane magnetization reversal of the Co rings measured by using magneto-optical Kerr effect reveals both flux closure and near-single domain states which clearly depend on the size and the thickness of the rings. Under low temperature imprint conditions, micro-rings of larger diameters can be obtained with a mold pattern of circular disks. The magnetization reversal of these rings is also affected by the flux closure process but it shows a different behavior compared to that of the submicron rings. (C) 2001 Elsevier Science BY All rights reserved.
引用
收藏
页码:405 / 410
页数:6
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