Optical and structural properties of single phase epitaxial p-type transparent oxide thin films

被引:63
作者
Luo, Hongmei
Jain, Menka
McCleskey, Thomas M.
Bauer, Eve
Burrell, Anthony K.
Jia, Quanxi
机构
[1] Los Alamos Natl Lab, Supercond Technol Ctr, Mat Phys & Applicat Div, Los Alamos, NM 87545 USA
[2] Los Alamos Natl Lab, Mat Chem Mat Phys & Applicat Div, Los Alamos, NM 87545 USA
关键词
D O I
10.1002/adma.200700528
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Single phase, epitaxial, transparent, and p-type CuAlO2 films are successfully grown on c-plane sapphire by polymer-assisted deposition. At wavelengths in the range of 400-1000 nm, the optical transmittance of the films is 60-80%. The energy band gap is 3.6 eV. The as-synthesized CuAlO2 films are highly resistive, with room-temperature resistivity around 10(5) Omega cm. The resistivity can be reduced to 10(3)-10(4) Omega cm by post-annealing films in oxygen.
引用
收藏
页码:3604 / +
页数:5
相关论文
共 24 条
[11]  
KAHEHI Y, 2005, J APPL PHYS, V97, P83535
[12]   P-type electrical conduction in transparent thin films of CuAlO2 [J].
Kawazoe, H ;
Yasukawa, M ;
Hyodo, H ;
Kurita, M ;
Yanagi, H ;
Hosono, H .
NATURE, 1997, 389 (6654) :939-942
[13]   Anisotropic electrical conductivity of delafossite-type CuAlO2 laminar crystal [J].
Lee, MS ;
Kim, TY ;
Kim, D .
APPLIED PHYSICS LETTERS, 2001, 79 (13) :2028-2030
[14]   RF reactive sputter deposition and characterization of transparent CuAlO2 thin films [J].
Lu, Y. M. ;
He, Y. B. ;
Yang, B. ;
Polity, A. ;
Volbers, N. ;
Neumann, C. ;
Hasselkamp, D. ;
Meyer, B. K. .
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 3, NO 8, 2006, 3 (08) :2895-+
[15]   Crystal chemistry and electrical properties of the delafossite structure [J].
Marquardt, MA ;
Ashmore, NA ;
Cann, DP .
THIN SOLID FILMS, 2006, 496 (01) :146-156
[16]  
Ohashi M, 2002, J AM CERAM SOC, V85, P270, DOI 10.1111/j.1151-2916.2002.tb00080.x
[17]   Effects of aluminum on the properties of p-type Cu-Al-O transparent oxide semiconductor prepared by reactive co-sputtering [J].
Ong, CH ;
Gong, H .
THIN SOLID FILMS, 2003, 445 (02) :299-303
[18]  
Pankove J.I., 1971, OPTICAL PROCESS SEMI
[19]   Characterization of CuAlO2 films prepared by dc reactive magnetron sputtering [J].
Reddy, A. Sivasankar ;
Reddy, P. Sreedhara ;
Uthanna, S. ;
Rao, G. Mohan .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2006, 17 (08) :615-620
[20]   p-type transparent conducting oxides [J].
Sheng, Su ;
Fang, Guojia ;
Li, Chun ;
Xu, Sheng ;
Zhao, Xingzhong .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2006, 203 (08) :1891-1900