Ceramic based resistive sensors

被引:116
作者
Wang, CC [1 ]
Akbar, SA [1 ]
Madou, MJ [1 ]
机构
[1] Ohio State Univ, Ctr Ind Sensors & Measurements, Columbus, OH 43210 USA
关键词
resistive sensor; semiconducting gas sensor; thermistor;
D O I
10.1023/A:1009978607621
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This paper reviews the current status and research trends of two types of ceramic based resistive sensors, thermistors and gas sensors. The issues and challenges associated with their development for high temperature applications are examined and discussed. Worldwide research efforts in ceramic based resistive sensors, devoted mostly to resolve the issues of selectivity and stability, are also reviewed. These efforts tend to integrate the results obtained from both empirical and basic science approaches, and focus on various stages of sensor development, including development of new material systems, sensor fabrication and manufacturing techniques, and smart sensor arrays.
引用
收藏
页码:273 / 282
页数:10
相关论文
共 42 条
[41]   NO(X) RESPONSE OF TIN DIOXIDE-BASED GAS SENSORS [J].
WILLIAMS, G ;
COLES, GSV .
SENSORS AND ACTUATORS B-CHEMICAL, 1993, 16 (1-3) :349-353
[42]   DEVELOPMENT OF CHEMICAL SENSORS USING MICROFABRICATION AND MICROMACHINING TECHNIQUES [J].
WU, QH ;
LEE, KM ;
LIU, CC .
SENSORS AND ACTUATORS B-CHEMICAL, 1993, 13 (1-3) :1-6