Spectroscopic ellipsometry study on the dielectric functions of GaPN alloys

被引:13
作者
Kanaya, H [1 ]
Yaguchi, H [1 ]
Hijikata, Y [1 ]
Yoshida, S [1 ]
Miyoshi, S [1 ]
Onabe, K [1 ]
机构
[1] Saitama Univ, Dept Elect & Elect Syst, Urawa, Saitama 3388570, Japan
来源
5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS | 2003年 / 0卷 / 07期
关键词
D O I
10.1002/pssc.200303430
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have determined the complex dielectric functions of GaP1-xNx alloys using spectroscopic ellipsometry to clarify the electronic structure. With increasing N concentration, the E-1-gap peak height for both epsilon(1) and epsilon(2) decreases and the E-1-gap energy shifts to higher energies, showing that the electronic state at the L point is considerably changed due to the N incorporation. In the lower energy range, a broad peak appears near the fundamental band gap energy of GaP. With increasing N concentration, this peak becomes broader and the peak height increases. This indicates that the band-edge formation in GaP1-xNx alloys is extremely unique compared to that in conventional semiconductor alloys. (C) 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:2753 / 2756
页数:4
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