Analytical transmission electron microscopy of hydrogen-induced degradation in ferroelectric Pb(Zr, Ti)O3 on a Pt electrode

被引:61
作者
Ikarashi, N [1 ]
机构
[1] NEC Corp Ltd, Silicon Syst Res Labs, Tsukuba, Ibaraki 3058501, Japan
关键词
D O I
10.1063/1.122333
中图分类号
O59 [应用物理学];
学科分类号
摘要
Changes in the crystal structure of Pb(Zr, Ti)O-3 (PZT) on a Pt electrode caused by annealing in hydrogen-containing ambient have been studied using analytical transmission electron microscopy. A decrease in Pb composition and distortion in Ti-O coordination occur at the PZT/Pt interface. These findings indicate that preferential reduction of Pb and sequential diffusion of Pb from the PZT to the Pt electrode play an important role in the changes of the PZT crystal. Thus, changes in crystal structure due to annealing in a hydrogen-containing ambient can be avoided by using electrode materials that prevent Pb diffusion. (C) 1998 American Institute of Physics. [S0003-6951(98)02340-7].
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页码:1955 / 1957
页数:3
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