Frequency dependent dielectric breakdown of thin polyimide films prepared by vapor deposition polymerization

被引：12

作者：

Miyairi, K ^{[1
]}

机构：

[1] Shinshu Univ, Fac Engn, Nagano 3808553, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 3A期

关键词：

breakdown; thin film; polyimide; vapor deposition polymerization;

D O I：

10.1143/JJAP.40.1297

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Dielectric breakdown of thin polyimide films prepared by vapor deposition polymerization has been investigated for various ac voltages. Real time measurements were made automatically with a system composed of a digital oscilloscope, controllable signal generator and microcomputer. The self-healing breakdown takes place at the peak of the applied voltage. The ac electric strength decreases with temperature, and it increases with frequency in the range of 10 Hz-3 kHz. The frequency dependent breakdown has been explained tentatively in terms of the establishment of a conductive path leading to the breakdown.

引用

页码：1297 / 1299

页数：3

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