Ellipsometry as a rapid method of establishing a correlation between the porosity and the gas sensitivity of tin dioxide layers

被引：8

作者：

Dimitrov, DT ^{[1
]}

Luchinin, VV ^{[1
]}

Moshnikov, VA ^{[1
]}

Panov, MV ^{[1
]}

机构：

[1] St Petersburg State Elect Engn Univ, St Petersburg 197376, Russia

来源：

TECHNICAL PHYSICS | 1999年 / 44卷 / 04期

关键词：

D O I：

10.1134/1.1259325

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

It is shown for the first time that reflection ellipsometry may be an effective method of establishing a correlation between the main parameters of gas-sensitive layers and their optical characteristics, suitable for rapid monitoring. This can advance the capability of predicting the properties of a material from its preparation conditions and consequently can reduce the optimization cycle time and thus lower the cost of a technology. (C) 1999 American Institute of Physics. [S1063-7842(99)02604-5].

引用

页码：468 / 469

页数：2

共 8 条

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Dimitrov, DT
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[3] Bestajev MV, 1998, IZV AKAD NAUK FIZ+, V62, P549
[4] DOLOTOV KI, 1994, IZV AKAD NAUK ROSS A, P83
[5] SELECTIVITY IN SEMICONDUCTOR GAS SENSORS
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[J]. SENSORS AND ACTUATORS, 1987, 12 (04): : 425 - 440
[6] TIN OXIDE GAS SENSOR AND COUNTERMEASURE SYSTEM AGAINST ACCIDENTAL GAS LEAKS
OYABU, T
OHTA, Y
KUROBE, T
[J]. SENSORS AND ACTUATORS, 1986, 9 (04): : 301 - 312
[7] Pshenitsyn V.I., 1986, ELLIPSOMETRY PHYSICO
[8] ROZHNOV GV, 1991, ELLIPSOMETRY THEORY, P34

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