Fabrication and characterization of a Pb5Ge3O11 one-transistor-memory device

被引:28
作者
Li, TK [1 ]
Hsu, ST [1 ]
Ulrich, B [1 ]
Ying, H [1 ]
Stecker, L [1 ]
Evans, D [1 ]
Ono, Y [1 ]
Maa, JS [1 ]
Lee, JJ [1 ]
机构
[1] Sharp Labs Amer Inc, Camas, WA 98607 USA
关键词
D O I
10.1063/1.1401092
中图分类号
O59 [应用物理学];
学科分类号
摘要
A Pb5Ge3O11 metal-ferroelectric-metal-oxide-silicon memory transistor has been fabricated. The device showed a memory window of about 2 V. The memory window was almost saturated at the operation voltage of 2 V. The "off" state drain current (I-D) at V-D of 0.1 V and V-G of 0.5 V is about 1x10(-8) A. The "on" state drain current (I-D) at V-D of 0.1 V and V-G of 0.5 V is about 1x10(-6) A, which is 100 times high than that of off state. (C) 2001 American Institute of Physics.
引用
收藏
页码:1661 / 1663
页数:3
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