Rare-earth doped glass waveguides prepared by pulsed laser deposition

被引：19

作者：

Afonso, CN ^{[1
]}

Ballesteros, JM ^{[1
]}

Gonzalo, J ^{[1
]}

Righini, GC ^{[1
]}

Pelli, S ^{[1
]}

机构：

[1] CNR,IROE,I-50127 FLORENCE,ITALY

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

关键词：

D O I：

10.1016/0169-4332(95)00550-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Rare-earth (Er,Yb) doped glass films are prepared by pulsed laser deposition onto different substrates: Si, fused quartz and Si with a silicon oxide buffer layer. Films grown in the presence of an oxygen pressure higher than 6 x 10(-2) mbar have a refractive index close and slightly higher than that of the bulk material thus proving that the density of the films is high. Films thicker than 1 mu m are multimode waveguides with a refractive index of 1.562 +/- 0.003 and show losses higher than 10 dB/cm which seem to be related to surface roughness due both to the substrate quality and the deposition process.

引用

页码：760 / 763

页数：4

共 15 条

[11] ERBIUM-DOPED PHOSPHOSILICATE GLASS WAVE-GUIDE AMPLIFIER FABRICATED BY PECVD [J].