Electromagnetic micro-device realized by electrochemical way

被引：11

作者：

Coutrot, AL

Dufour-Gergam, E

Martincic, E

Gilles, JP

Grandchamp, JP

Quemper, JM

Bosseboeuf, A

Alves, F

Ahamada, B

机构：

[1] Univ Paris 11, CNRS UMR 8622, Inst Elect Fondamentale, F-91405 Orsay, France

[2] Lab Elect Signaux & Robot, CNRS UPRESA 8029, F-94235 Cachan, France

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 91卷 / 1-2期

关键词：

micro-moulding; micro-coil; copper; permalloy; electrodeposition;

D O I：

10.1016/S0924-4247(01)00503-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, realization process and electroplated copper and permalloy properties are presented in order to fabricate micro-coils. RF electrical and magnetic characterizations of the first devices with 40 turns obtained for low frequencies application are exposed showing an inductive behavior under 220 MHz (L = 320 nH) and a capacitive behavior above. Experimental results are compared with calculations. A comparative magnetic field measurement is performed using micro-coils and AMR. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：80 / 84

页数：5

共 12 条

[1] Planar micromachined spiral inductor for integrated magnetic microactuator applications [J].