Microcoils fabricated by UV depth lithography and galvanoplating

被引：32

作者：

Lochel, B

Maciossek, A

Rothe, M

Windbracke, W

机构：

[1] Fraunhofer-Inst. Siliziumtechnologie, D-14199 Berlin

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期

关键词：

photoresist; thick layers; UV patterning; electrodeposition; microcoils;

D O I：

10.1016/S0924-4247(97)80034-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Three-dimensional (3D) UV microforming delivers promising results for advanced surface micromachining. This low-cost technology, a combination of UV patterning of very thick photoresist layers and moulding of the resulting patterns by electrodeposition, opens a wide range of applications. It allows the use of materials with interesting properties that could not be provided by standard processes. Furthermore, this method can be carried out directly on pre-processed chips. The practical application of the technology is demonstrated by planar and 3D microcoils.

引用

页码：663 / 668

页数：6

共 15 条

[1] CULLMAN E, 1994, P MICROSYSTEM TECHNO, P173
[2] HIGH DEPTH TO WIDTH ASPECT RATIOS IN THICK POSITIVE PHOTORESIST LAYERS USING NEAR UV LITHOGRAPHY
ENGELMANN, G
REICHL, H
[J]. MICROELECTRONIC ENGINEERING, 1992, 17 (1-4) : 303 - 306
[3] Engelmann G., 1992, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots(Cat. No.92CH3093-2), P93, DOI 10.1109/MEMSYS.1992.187697
[4] Selectively released microstructures electroplated into thick positive photoresist
Engelmann, G.
Ehrmann, O.
Leutenbauer, R.
Schmirz, H.
Reichi, H.
[J]. Journal of Micromechanics and Microengineering, 1993, 3 (03) : 152 - 154
[5] ENGELMANN G, 1993, P MME 93 NEUCH, P85
[6] ENGELMANN G, 1993, SPIE, V2045, P305
[7] Gobet J., 1993, Journal of Micromechanics and Microengineering, V3, P123, DOI 10.1088/0960-1317/3/3/007
[8] GALVANOPLATED 3D STRUCTURES FOR MICRO SYSTEMS
LOCHEL, B
MACIOSSEK, A
KONIG, M
QUENZER, HJ
HUBER, HL
[J]. MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 455 - 459
[9] MAGNETICALLY DRIVEN MICROSTRUCTURES FABRICATED WITH MULTILAYER ELECTROPLATING
LOCHEL, B
MACIOSSEK, A
QUENZER, HJ
WAGNER, B
ENGELMANN, G
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1995, 46 (1-3) : 98 - 103
[10] FABRICATION OF MAGNETIC MICROSTRUCTURES BY USING THICK LAYER RESISTS
LOCHEL, B
MACIOSSEK, A
KONIG, M
HUBER, HL
BAUER, G
[J]. MICROELECTRONIC ENGINEERING, 1993, 21 (1-4) : 463 - 466

← 1 2 →