Static TOF-SIMS - a VAMAS interlaboratory study. Part I. Repeatability and reproducibility of spectra

An interlaboratory study involving 32 Time-of-Flight Static SIMS instruments from 12 countries has been conducted. Analysts were supplied, by NPL, with a protocol for analysis together with three reference materials; a thin layer of polycarbonate (PC) on a silicon wafer, a thin layer of polystyrene (PS) oligomers on etched silver and poly(tetrafluoroethylene) (PTFE). The study involved static SIMS analysis of each reference material for both positive and negative polarity secondary ions. The option to test instrument suitability for G-SIMS was also provided. The results of this study show that over 84% of instruments have excellent repeatabilities of better than 1.9%. Repeatabilities can be as good as 0.4%. A relative instrument spectral response (RISR) is calculated for each instrument for each reference material and ion polarity. The RISR is used to evaluate variations in spectral response between different generic types of SIMS instruments. Use of the RISR allows the identification of contamination, charge stabilisation problems and incorrectly functioning ion detectors. The high quality of the data presented here allows the RISR to reveal differences in individual operation of each instrument such as the use of apertures to remove metastables from the spectra and the use of different post-acceleration voltages for ion detection. Spectral reproducibility can be measured, here, by the equivalence of RISRs between materials and ion polarities. It is found that reproducibilities are on average 10% but can be as good as 4% for the best instruments. This figure shows the consistency between instruments in measuring spectra from different samples. This study sets out the basic framework to develop static secondary ion mass spectrometry (SSIMS) as a reliable measurement method. (c) Crown Copyright 2005.