MEPHISTO: Performance tests of a novel synchrotron imaging photoelectron spectromicroscope

被引：49

作者：

De Stasio, G ^{[1
]}

Capozi, M

Lorusso, GF

Baudat, PA

Droubay, TC

Perfetti, P

Margaritondo, G

Tonner, BP

机构：

[1] Ecole Polytech Fed Lausanne, Inst Phys Appl, CH-1015 Lausanne, Switzerland

[2] CNR, Ist Struttura Mat, I-00133 Rome, Italy

[3] Univ Wisconsin, Ctr Xray Lithog, Stoughton, WI 53589 USA

[4] Univ Wisconsin, Dept Phys, Milwaukee, WI 53211 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1998年 / 69卷 / 05期

关键词：

D O I：

10.1063/1.1148899

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We discuss the scheme rind test performances of this recently commissioned system in its final configuration. The tests show that the improvements in the electron optics system with respect to other instruments in the same class made it possible to reach lateral resolutions in the 50 nm range. They also demonstrate rather good spectromicroscopy and spectroscopy performances, reliability and flexibility of operation. (C) 1998 American Institute of Physics.

引用

页码：2062 / 2066

页数：5

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