Electrophoresis of nanodiamond powder for cold cathode fabrication

被引:28
作者
Alimova, AN
Chubun, NN
Belobrov, PI
Detkov, PY
Zhirnov, VV [1 ]
机构
[1] Russian Acad Sci, Inst Crystallog, Moscow 117333, Russia
[2] ISTOK, State Res & Prod Corp, Fryazino 141120, Moscow Region, Russia
[3] Russian Acad Sci, Inst Biophys, Krasnoyarsk 660036, Russia
[4] Russian Fed Nucl Ctr, Snezhinsk 456770, Russia
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 02期
关键词
D O I
10.1116/1.590625
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The process of electrophoresis/dielectrophoresis of shock-synthesized nanodiamond powders on the large-area Si field emission arrays was studied. The process was found to be very sensitive to the modification of nanodiamond powder. The growth rate and film morphology of nanodiamond coatings on Si tips were investigated. Results in fabrication and testing of nanodiamond-based cold cathodes and sealed device prototypes are presented. (C) 1999 American Vacuum Society. [S0734-211X(99)06002-3].
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页码:715 / 718
页数:4
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