Sharp ferroelectric phase transition in strained single-crystalline SrRuO3/Ba0.7Sr0.3TiO3/SrRuO3 capacitors

被引:38
作者
Dittmann, R
Plonka, R
Vasco, E
Pertsev, NA
He, JQ
Jia, CL
Hoffmann-Eifert, S
Waser, R
机构
[1] Forschungszentrum Julich, Inst Festkorperforsch, D-52425 Julich, Germany
[2] Forschungszentrum Julich, Ctr Nanoelectr Syst Informat Technol, D-52425 Julich, Germany
[3] Rhein Westfal TH Aachen, Inst Werkstoffe & Elektrotech, D-52056 Aachen, Germany
[4] Russian Acad Sci, AF Ioffe Physicotech Inst, St Petersburg 194021, Russia
关键词
D O I
10.1063/1.1633027
中图分类号
O59 [应用物理学];
学科分类号
摘要
Single-crystalline all-perovskite SrRuO3/Ba0.7Sr0.3TiO3/SrRuO3 thin-film capacitors epitaxially grown on SrTiO3 exhibit a sharp paraelectric-to-ferroelectric phase transition at 350 K with a maximum permittivity of about 6660. This value is comparable to that of bulk ceramics and exceeds by several times the highest values reported for Ba0.7Sr0.3TiO3 thin film capacitors. The observed thickness dependence of the dielectric response is analyzed with the aid of a thermodynamic theory. It is shown that a weak decrease of the permittivity with the Ba0.7Sr0.3TiO3 thickness decreasing from 200 to 10 nm can be explained solely by the thickness-dependent strain relaxation in epitaxial films without assuming the presence of low-permittivity layers at the film/electrode interfaces. (C) 2003 American Institute of Physics.
引用
收藏
页码:5011 / 5013
页数:3
相关论文
共 20 条
[1]  
Abe K, 1998, IEICE T ELECTRON, VE81C, P505
[2]   FERROELECTRIC PROPERTIES IN EPITAXIALLY GROWN BAXSR1-XTIO3 THIN-FILMS [J].
ABE, K ;
KOMATSU, S .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (12) :6461-6465
[3]   Optimization of the tunability of barium strontium titanate films via epitaxial stresses [J].
Ban, ZG ;
Alpay, SP .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (01) :504-511
[4]   The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO3 thin films grown by chemical vapor deposition [J].
Basceri, C ;
Streiffer, SK ;
Kingon, AI ;
Waser, R .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (05) :2497-2504
[5]   Electrical properties and crystal structures of (Ba,Sr)TiO3 films and BaRuO3 bottom electrodes prepared by sputtering [J].
Chu, CM ;
Lin, P .
APPLIED PHYSICS LETTERS, 1998, 72 (10) :1241-1243
[6]   Dielectric properties of Ba1-xSrxTiO3 ceramics [J].
Hilton, AD ;
Ricketts, BW .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1996, 29 (05) :1321-1325
[7]   Thickness-dependent dielectric constants of (Ba,Sr)TiO3 thin films with Pt or conducting oxide electrodes [J].
Hwang, CS .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (01) :432-437
[8]   STRUCTURAL AND ELECTRICAL-PROPERTIES OF BA0.5SR0.5TIO3 THIN-FILMS WITH CONDUCTIVE SRRUO3 BOTTOM ELECTRODES [J].
JIA, QX ;
WU, XD ;
FOLTYN, SR ;
TIWARI, P .
APPLIED PHYSICS LETTERS, 1995, 66 (17) :2197-2199
[9]   (Ba,Sr)TiO3 dielectrics for future stacked-capacitor DRAM [J].
Kotecki, DE ;
Baniecki, JD ;
Shen, H ;
Laibowitz, RB ;
Saenger, KL ;
Lian, JJ ;
Shaw, TM ;
Athavale, SD ;
Cabral, C ;
Duncombe, PR ;
Gutsche, M ;
Kunkel, G ;
Park, YJ ;
Wang, YY ;
Wise, R .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1999, 43 (03) :367-382
[10]  
MATTHEWS JW, 1974, J CRYST GROWTH, V27, P118, DOI 10.1016/0022-0248(74)90424-2