Low-friction TiN-MoS2 coatings produced by dc magnetron co-deposition

被引：112

作者：

Gilmore, R ^{[1
]}

Baker, MA

Gibson, PN

Gissler, W

Stoiber, M

Losbichler, P

Mitterer, C

机构：

[1] Commiss European Union, Joint Res Ctr, Inst Adv Mat, I-21020 Ispra, VA, Italy

[2] Univ Leoben, Dept Phys Met & Mat Testing, A-8700 Leoben, Austria

来源：

SURFACE & COATINGS TECHNOLOGY | 1998年 / 108卷 / 1-3期

关键词：

hard coatings; low friction; co-sputtering; TiN-MoS2;

D O I：

10.1016/S0257-8972(98)00602-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Coatings of the overall composition TiNx(MoSy)(z) have been produced by dc co-sputter deposition from a single unbalanced magnetron target composed of TiN and MoS2 halves. Compositional variation was obtained by placing stainless steel substrates at various positions with respect to the target. X-ray diffraction and photoelectron spectroscopy showed that the coatings were composed of distinct TiNx and MoSy phases in the form of a nanodispersive system. Pin-on-disk tribometry and nanoindentation demonstrated that coatings with a hardness exceeding 20 GPa and friction coefficients of about 0.1 could be produced by selecting suitable composition and deposition parameters. These coatings show potential for improved endurance with respect to current MoS2-based low-friction coatings and may be suitable for use in severe conditions, for example, as cutting tool coatings for dry machining. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：345 / 351

页数：7

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