Picosecond ultrasonic study of Mo/Si multilayer structures using an alternating-pump technique

被引：18

作者：

Pu, NW ^{[1
]}

Bokor, J

Jeong, S

Zhao, RA

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Ctr Xray Opt, Berkeley, CA 94720 USA

[3] Univ Calif Berkeley, Dept Mat Sci & Mineral Engn, Berkeley, CA 94720 USA

来源：

APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 02期

关键词：

D O I：

10.1063/1.123010

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have used picosecond ultrasonics techniques to study the localized acoustic-phonon surface modes in Mo/Si multilayer reflectors for extreme ultraviolet lithography. Localized surface modes in the first (zone-boundary) and second (zone-center) gaps were simultaneously detected. Oscillation frequency as high as 0.873 THz was observed. An alternating-pump technique has been successfully demonstrated to enhance the signal-to-noise ratio by 10 dB. This technique can be used to improve the sensitivity for probing the surface modes in other multilayer thin-film structures. (C) 1999 American Institute of Physics. [S0003-6951(99)03302-1].

引用

页码：320 / 322

页数：3

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